Sample Rotation

•  Sample Holder Design for Easy Sample Replacement
• - Optimal Design for Improved Deposition Uniformity
• - Sample Heating (Up to 300 ℃) / Cooling (Down to 5 ℃) Available

• Sample Backside Cooling

  AC Motor & Motor Controller	1 Set
  Rotation Speed	1 ~ 20 rpm
  Cool Down Temp.	5 ~ 10 ℃
  Special Cooling Block Cool Down Temp.	- 170 ℃
  Film Thickness Uniformity	<+/-5% within 170mm * 170mm Glass

• Sample Holder Design for Easy Sample Replacement
• - Optimal Design for Improved Deposition Uniformity
• - Sample Chuck Ass’y for Sample & Substrate Contact
• - Solenoid Valve Ass’y for Water Flow On/Off & Water Purge 

• Sample Rotation + Heating System

  AC Motor & Motor Controller	1 Set
  Rotation Speed	1 ~ 20 rpm
  Heating Element	Halogen Lamp
  Heat Up Temp.	~ 300 ℃

•  Improve surface resistance
• - Improved deposition adhesion
• - Sample Holder Design for Easy Sample Replacement
• - Optimal Design for Improved Deposition Uniformity