Dual Process Chamber in One Glovebox : Metal Process Chamber and Organic Process Chamber for Perovskite Processing
Dual Process Chamber in One Glovebox : Metal Process Chamber and Organic Process Chamber for Perovskite Processing
Dual Process Chamber in One Glovebox : Metal Process Chamber and Organic Process Chamber for Perovskite Processing
|
Process Chamber Dimension |
450(L)X355(H)X(450) |
|
Sample Size |
Piece to Max 170mm * 170mm Glass |
|
Chamber Ultimate Pressure |
Below than 3.0 x 10-7 Torr |
|
Chamber Working Pressure |
Below than 5.0 x 10-6 Torr within 30 Minutes |
|
Film Thickness Uniformity |
<+/-5% within 170mm * 170mm Glass |
