Products Glove Box SystemThermal Evaporator Glove Box

Single Chamber Sliding Door Type

Make : KIYON,KOREA
Model : KESD 170-2M20
Categories : Glove Box System,Thermal Evaporator Glove Box

Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.

  • Description
  • Specifications

Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.

  • Front Door for Sample Loading & Source Refill In Glovebox Condition
  • Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
  • System Fully Automation Control by PC Control Available
  • System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) : Auto Pumping, Auto Venting, Auto System Shut Down
  • Auto Deposition Control & Co-deposition Process Available
  • Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

       

    Process Chamber Dimension

     

    450(L)X355(H)X(450)

     

    Sample Size

     

    Piece to Max 170mm * 170mm Glass

     

    Chamber Ultimate Pressure

     

    Below than 3.0 x 10-7 Torr

     

    Chamber Working Pressure

     

    Below than 5.0 x 10-6 Torr within 30 Minutes

     

    Film Thickness Uniformity

     

    <+/-5% within 170mm * 170mm Glass

     

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